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Formation of local ferromagnetic areas on GaAs by focused Mn ion beam implantation

✍ Scribed by M. Kasai; J. Yanagisawa; H. Tanaka; S. Hasegawa; H. Asahi; K. Gamo; Y. Akasaka

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
420 KB
Volume
242
Category
Article
ISSN
0168-583X

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✦ Synopsis

Magnetic and chemical properties of Mn-implanted surfaces of a GaAs substrate were investigated using a magnetic force microscope (MFM) and X-ray photoemission spectroscopy (XPS). The Mn implanted region was changed to a grain structure after annealing at 840 Β°C for 10 s, and ferromagnetic characteristics were observed in each grain. From the XPS spectra, it was found that implanted Mn was chemically bonded with other elements, indicating the formation of ferromagnetic materials such as GaMn and MnAs.

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