A study on in-situ maskless selective epitaxy of GaAs by a low-energy Ga focused ion beam with an As4 molecular beam

✍ Scribed by Isao Saitoh; Kangsa Pak; Yuichiroh Inoue; Naoki Ohshima; Hiroo Yonezu

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 256 KB
• Volume: 146
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(94)00494-3