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In-situ maskless selective area epitaxy of GaAs using a low-energy Ga focused ion beam

โœ Scribed by Kangsa Pak; Isao Saitoh; Naoki Ohshima; Hiroo Yonezu


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
404 KB
Volume
140
Category
Article
ISSN
0022-0248

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