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Reduction of carbon incorporation in the in-situ selective-area epitaxy of GaAs by metalorganic molecular beam epitaxy using tris-dimethylaminoarsine

โœ Scribed by Seikoh Yoshida; Masahiro Sasaki


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
393 KB
Volume
150
Category
Article
ISSN
0022-0248

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