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Etching characteristics of TiNi thin film by focused ion beam

✍ Scribed by D.Z. Xie; B.K.A. Ngoi; Y.Q. Fu; A.S. Ong; B.H. Lim


Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
191 KB
Volume
225
Category
Article
ISSN
0169-4332

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