✦ LIBER ✦

Sources of SIMOX buried oxide leakage

✍ Scribed by M.J. Anc; W.A. Krull

Book ID: 103599438
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 291 KB
Volume: 28
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(95)00085-m

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