✦ LIBER ✦

Anomalous defects in buried oxide of SIMOX structure

✍ Scribed by Wang Z.-L.; Chen N.X.; Huang C.

Book ID: 113280614
Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 567 KB
Volume: 48
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(90)90164-p

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