๐”– Bobbio Scriptorium
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Interaction of deuterium with SIMOX buried oxide

โœ Scribed by A Rivera; A van Veen; H Schut; J.M.M de Nijs; P Balk

Book ID
108411193
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
73 KB
Volume
59
Category
Article
ISSN
0167-9317

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๐Ÿ“œ SIMILAR VOLUMES

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After a short summary of the status of the buried 6x~qCle layer in SIMOX structures as of 1994, this pal~er reviews the developments since then. The main fOf~iCS are as follows: effects of processing condltiOttS, such aS low oxygen dose implantation, add;lionel oxidation; holetrappng behavior and co

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Evaluation of buried oxide formation in low-dose SIMOX process
โœ A Ogura; H Ono ๐Ÿ“‚ Article ๐Ÿ“… 2000 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 432 KB

## ลฝ . Formation of a buried oxide BOX layer during high-temperature annealing in a separation by implanted oxygen ลฝ . ลฝ . SIMOX process was evaluated by means of Fourier-transform infrared FTIR absorption spectroscopy. The evaluation results suggested that the formation process could be controlle