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The behaviour of deuterium incorporated into the buried oxide of SIMOX

โœ Scribed by A Rivera; A van Veen; H Schut; J.M.M de Nijs; P Balk; P.F.A Alkemade

Book ID
114164419
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
136 KB
Volume
178
Category
Article
ISSN
0168-583X

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๐Ÿ“œ SIMILAR VOLUMES

Properties of the buried oxide layer in
Properties of the buried oxide layer in SIMOX structures
โœ A.G. Revesz; H.L. Hughes ๐Ÿ“‚ Article ๐Ÿ“… 1997 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 605 KB

After a short summary of the status of the buried 6x~qCle layer in SIMOX structures as of 1994, this pal~er reviews the developments since then. The main fOf~iCS are as follows: effects of processing condltiOttS, such aS low oxygen dose implantation, add;lionel oxidation; holetrappng behavior and co