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Simulation of oxide sputtering and SIMS depth profiling of delta-doped layer

✍ Scribed by Y. Yamamura; M. Ishida

Book ID: 108417833
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 203 KB
Volume: 203-204
Category: Article
ISSN: 0169-4332
DOI: 10.1016/s0169-4332(02)00659-1

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