✦ LIBER ✦

Simulation on SIMS depth profiling of delta-doped layer including relaxation caused by defects

✍ Scribed by M. Ishida; S. Nagao; Y. Yamamura

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Simulation of oxide sputtering and SIMS

✍ Y. Yamamura; M. Ishida 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 203 KB

Dynamic Monte Carlo simulation for SIMS

✍ H.J. Kang; W.S. Kim; D.W. Moon; H.Y. Lee; S.T. Kang; R. Shimizu 📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 244 KB

SIMS study of depth profiles of delta-do

✍ S. Hayashi; A. Takano; H. Takenaka; Y. Homma 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 208 KB