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Dynamic Monte Carlo simulation for SIMS depth profiling of delta-doped layer

โœ Scribed by H.J. Kang; W.S. Kim; D.W. Moon; H.Y. Lee; S.T. Kang; R. Shimizu

Book ID
114170951
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
244 KB
Volume
153
Category
Article
ISSN
0168-583X

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