✦ LIBER ✦
SIMS study of depth profiles of delta-doped boron/silicon alternating layers by low-energy ion beams
✍ Scribed by S. Hayashi; A. Takano; H. Takenaka; Y. Homma
- Book ID
- 108417834
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 208 KB
- Volume
- 203-204
- Category
- Article
- ISSN
- 0169-4332
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