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SIMS depth profiling using new gate techniques

✍ Scribed by J. L. Maul; H. Frenzel


Book ID
112376569
Publisher
Springer
Year
1989
Tongue
English
Weight
120 KB
Volume
333
Category
Article
ISSN
1618-2650

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Electron-stimulated desorption mass spectrometry (ESDMS), a new technique based on the mass analysis of ions desorbed by a high-energy (several keV) electron beam, has analytical features that complement SIMS. The ESDMS has high sensitivity in the surface analysis of both adsorbates and the Ðrst one