✦ LIBER ✦
Quantitative SIMS depth profiling of diffusion barrier gate-oxynitride structures in TFT-LCDs
✍ Scribed by Sabine Dreer; Peter Wilhartitz; Kurt Piplits; Karl Mayerhofer; Johann Foisner; Herbert Hutter
- Book ID
- 105888735
- Publisher
- Springer
- Year
- 2004
- Tongue
- English
- Weight
- 443 KB
- Volume
- 379
- Category
- Article
- ISSN
- 1618-2650
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