✦ LIBER ✦

SIMS analysis of buried silicon nitride layers formed by high dose implantation of 14N and 15N

✍ Scribed by J.A. Kilner; R.J. Chater; P.L.F. Hemment; R.F. Peart; K.J. Reeson; R.P. Arrowsmith; J.R. Davis

No coin nor oath required. For personal study only.

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