Optical and compositional studies of buried oxide layers in silicon formed by high dose implantation

✍ Scribed by R.J. Chater; J.A. Kilner; E. Scheid; S. Cristoloveneau; P.L.F. Hemment; K.J. Reeson

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 353 KB
• Volume: 30
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(87)90116-4