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Structural characterization of buried nitride layers formed by nitrogen ion implantation in silicon

✍ Scribed by A.D. Yadav; A.P. Patel; S.K. Dubey; B.K. Panigrahi; R. Kesavamoorthy; K.G.M. Nair

Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
190 KB
Volume
266
Category
Article
ISSN
0168-583X

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