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Analysis of electrical properties of buried nitride formed by high dose N+ implantation

✍ Scribed by Zhang Shunkai; Lin Chenglu; Zhou Zuyao; Zou Shichang


Book ID
113281624
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
326 KB
Volume
59-60
Category
Article
ISSN
0168-583X

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