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Formation of buried carbon nitride by high dose nitrogen implantation into carbon thin film

✍ Scribed by Huoping Xin; Chenglu Lin; Shiyang Zhu; Shichang Zou; Xiaohong Shi; Hong Zhu; P.L.F. Hemment


Book ID
113286737
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
361 KB
Volume
103
Category
Article
ISSN
0168-583X

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