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Nitrogen-15 isotope tracer studies of buried nitride layer formation by high dose implantation

✍ Scribed by J.A. Kilner; R.J. Chater; K.J. Reeson; P.L.F. Hemment; J.R. Davis

Book ID
113280169
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
398 KB
Volume
39
Category
Article
ISSN
0168-583X

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