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Silicon–carbon thin films deposited by excimer lamp-CVD from disilane and ethylene.

✍ Scribed by X Redondas; P González; B León; M Pérez-Amor

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Influence of the substrate temperature o

✍ X Redondas; P González; B León; M Pérez-Amor 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 127 KB

Deposition of silicon nitride thin films

✍ P. Alpuim; L.M. Gonçalves; E.S. Marins; T.M.R. Viseu; S. Ferdov; J.E. Bourée 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 509 KB

Silicon oxide thin films grown by Xe2∗ e

✍ P. González; E. García; J. Pou; D. Fernández; J. Serra; B. León; M. Pérez-Amor 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 308 KB

Conformity of Aluminum Thin Films Deposi

✍ Anne-Lise Thomann; Constantin Vahlas; Lyacine Aloui; Diane Samelor; Amael Cailla 📂 Article 📅 2011 🏛 John Wiley and Sons 🌐 English ⚖ 667 KB

Low temperature amorphous and nanocrysta

✍ M. Fonrodona; D. Soler; J. Escarré; F. Villar; J. Bertomeu; J. Andreu; A. Saboun 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 115 KB

Quantitative analysis of tungsten, oxyge

✍ J.E. Bourée; J. Guillet; C. Grattepain; J. Chaumont 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 318 KB