Silicon oxide thin films grown by Xe2∗ excimer lamp chemical vapour deposition: the role of the substrate temperature and the window-substrate distance

✍ Scribed by P. González; E. García; J. Pou; D. Fernández; J. Serra; B. León; M. Pérez-Amor

• Book ID: 107864536
• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 308 KB
• Volume: 241
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(94)90455-3