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Influence of the substrate temperature on silicon–carbon thin films deposited from SiH4 and C2H4 by excimer lamp–CVD

✍ Scribed by X Redondas; P González; B León; M Pérez-Amor

Book ID: 108389242
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 127 KB
Volume: 317
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(97)00601-9

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