✦ LIBER ✦

Influence of substrate temperature on the properties of fluorinated silicon-nitride thin films deposited by IC-RPECVD

✍ Scribed by J. Fandiño; A. López-Suárez; B. M. Monroy; G. Santana; A. Ortiz; J. C. Alonso; A. Oliver

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The influence of deposition temperature

📂 Article 📅 1977 🏛 Elsevier Science 🌐 English ⚖ 151 KB

The influence of the substrate temperatu

✍ Shadia. J. Ikhmayies; Riyad N. Ahmad-Bitar 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 328 KB

Effect of deposition temperature on the

✍ L.S. Patil; R.K. Pandey; Jaspal P. Bange; S.A. Gaikwad; D.K. Gautam 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 330 KB

Influence of substrate temperature on th

✍ I. Esquivias; T. Rodríguez; J. Sanz-Maudes; J. Sangrador 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 204 KB

Influence of the substrate temperature o

✍ W. Bretschneider; G. Beddies 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 353 KB

Influence of substrate temperature on th

📂 Article 📅 1965 🏛 Elsevier Science 🌐 English ⚖ 113 KB