✦ LIBER ✦

Silicon oxidation studies: A revised model for thermal oxidation

✍ Scribed by Irene, E. A.

Book ID: 126863331
Publisher: American Institute of Physics
Year: 1983
Tongue: English
Weight: 550 KB
Volume: 54
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.332722

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