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Bulk model of rapid thermal oxidation of silicon

✍ Scribed by O. V. Aleksandrov; A. I. Dus’

Book ID: 110203119
Publisher: Pleiades Publishing
Year: 2009
Tongue: English
Weight: 202 KB
Volume: 3
Category: Article
ISSN: 1027-4510
DOI: 10.1134/s1027451009040235

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