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Modellization of the silicon rapid thermal oxidation in the initial stages according to the silicon fragments model

✍ Scribed by J.-J. Ganem; S. Rigo; I. Trimaille

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 383 KB
Volume: 22
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(93)90125-o

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