𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Numerical modelling of viscous flow in silicon thermal oxidation with the boundary element method

✍ Scribed by A. V. Panjukhin; N. A. Kolobov; N. A. Leontjeva

Publisher
John Wiley and Sons
Year
1994
Tongue
English
Weight
544 KB
Volume
7
Category
Article
ISSN
0894-3370

No coin nor oath required. For personal study only.

✦ Synopsis

Abstract

This paper describes the application of the boundary element method to solving two‐dimensional steady slow viscous flow problems (creeping flow) in thermal silicon oxidation. The proposed method used the velocity–pressure formulation. The use of the incompressibility condition as a boundary condition and the application of the second Green's identity to transform the domain integral into a boundary integral result in a system of three boundary integral equations for velocity components and pressure. Solution of this system to be an ill‐posed problem because of the presence of boundary conditions of the first kind. Two methods of regularization are employed. The numerical results for trench oxidation process are presented.

📜 SIMILAR VOLUMES

Numerical calculation of grounding syste
Numerical calculation of grounding system buried in vertical earth model in low frequency domain based on the boundary element method
✍ Zhong-Xin Li; Guang-Fan Li; Jian-Bin Fan; Cui-Xia Zhang 📂 Article 📅 2009 🏛 John Wiley and Sons 🌐 English ⚖ 665 KB

## Abstract To solve a grounding problem which describes a grounding system with floating metallic conductors buried in vertical multilayer earth model under a high voltage a.c. substation, a new mathematical model for accurately computing currents flowing along conductors of the grounding system h