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Influence of rapid thermal oxidation on differently prepared porous silicon

โœ Scribed by Walter Lang; Peter Steiner; Frank Kozlowski; Peter Ramm


Book ID
107864357
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
458 KB
Volume
255
Category
Article
ISSN
0040-6090

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## Influence of Mechanical Stress on Thermal Oxidation Phenomena of Silicon Some phenomena of the thermal wet oxidation of polycrystalline silicon structures are discussed in connection with the geometry of this structures and mechanical stress present in the growing oxide layer. A model is presen