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Modified Deal Grove model for the thermal oxidation of silicon carbide

✍ Scribed by Song, Y.; Dhar, S.; Feldman, L. C.; Chung, G.; Williams, J. R.


Book ID
118141765
Publisher
American Institute of Physics
Year
2004
Tongue
English
Weight
402 KB
Volume
95
Category
Article
ISSN
0021-8979

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