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Silicon Oxidation Studies: Silicon Orientation Effects on Thermal Oxidation

✍ Scribed by Irene, Eugene A.

Book ID: 121663609
Publisher: The Electrochemical Society
Year: 1986
Tongue: English
Weight: 469 KB
Volume: 133
Category: Article
ISSN: 0013-4651
DOI: 10.1149/1.2108829

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