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Chemically enhanced thermal oxidation of silicon

✍ Scribed by Schmidt, P.F.; Jaccodine, R.J.; Wolowodiuk, C.H.; Kook, T.

Book ID: 121894480
Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 342 KB
Volume: 3
Category: Article
ISSN: 0167-577X
DOI: 10.1016/0167-577X(85)90063-1

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