✦ LIBER ✦

Photon enhanced oxidation of silicon

✍ Scribed by Young, Edwin M.

Book ID: 121849256
Publisher: American Institute of Physics
Year: 1983
Tongue: English
Weight: 411 KB
Volume: 42
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.93726

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