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Self-formation of GaN hollow nanocolumns by inductively coupled plasma etching

✍ Scribed by S.C. Hung; Y.K. Su; S.J. Chang; S.C. Chen; L.W. Ji; T.H. Fang; L.W. Tu; M. Chen

Book ID: 106019831
Publisher: Springer
Year: 2005
Tongue: English
Weight: 343 KB
Volume: 80
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s00339-005-3219-z

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