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Nonselective etching of GaN/AlGaN heterostructures by Cl2/Ar/BCl3inductively coupled plasmas

✍ Scribed by Yanjun Han; Song Xue; Tong Wu; Zhen Wu; Wenping Guo; Yi Luo; Zhibiao Hao; Changzheng Sun

Book ID: 111784444
Publisher: SP Science China Press
Year: 2004
Tongue: English
Weight: 288 KB
Volume: 47
Category: Article
ISSN: 1006-9321
DOI: 10.1360/03ye0256

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