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Inductively coupled plasma etching of GaN using BCl 3 /Cl 2 chemistry and photoluminescence studies of the etched samples

✍ Scribed by Remashan, K; Chua, S J; Ramam, A; Prakash, S; Liu, W

Book ID: 121419640
Publisher: Institute of Physics
Year: 2000
Tongue: English
Weight: 83 KB
Volume: 15
Category: Article
ISSN: 0268-1242
DOI: 10.1088/0268-1242/15/4/313

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