Nonselective and smooth etching of GaN/AlGaN heterostructures by Cl[sub 2]/Ar/BCl[sub 3] inductively coupled plasmas

✍ Scribed by Han, Yanjun; Xue, Song; Wu, Tong; Wu, Zhen; Guo, Wenping; Luo, Yi; Hao, Zhibiao; Sun, Changzheng

• Book ID: 121827305
• Publisher: AVS (American Vacuum Society)
• Year: 2004
• Tongue: English
• Weight: 531 KB
• Volume: 22
• Category: Article
• ISSN: 0734-2101
• DOI: 10.1116/1.1641054