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Room temperature inductively coupled plasma etching of InAs/InSb in BCl3/Cl2/Ar

✍ Scribed by Sun, Jian; Kosel, Jürgen

Book ID: 120521067
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 1004 KB
Volume: 98
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2012.07.018

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