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Effect of Inductively Coupled Plasma Etching in p-Type GaN Schottky Contacts

✍ Scribed by Shiojima, Kenji; Takahashi, Toshifumi; Kaneda, Naoki; Mishima, Tomoyoshi; Nomoto, Kazuki

Book ID: 127099204
Publisher: Institute of Pure and Applied Physics
Year: 2013
Tongue: English
Weight: 732 KB
Volume: 52
Category: Article
ISSN: 0021-4922
DOI: 10.7567/jjap.52.08jj08

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