High-Temperature Isothermal Capacitance Transient Spectroscopy Study on Inductively Coupled Plasma Etching Damage for p-GaN Surfaces

✍ Scribed by Aoki, Toshichika; Wakayama, Hisashi; Kaneda, Naoki; Mishima, Tomoyoshi; Nomoto, Kazuki; Shiojima, Kenji

• Book ID: 127182458
• Publisher: Institute of Pure and Applied Physics
• Year: 2013
• Tongue: English
• Weight: 710 KB
• Volume: 52
• Category: Article
• ISSN: 0021-4922
• DOI: 10.7567/jjap.52.11nh03