✦ LIBER ✦
Low-Dimensional Waveguide Grating Fabrication in GaN with Use of SiCl4/Cl2/Ar-Based Inductively Coupled Plasma Dry Etching
✍ Scribed by R. Dylewicz; S. Patela; R. A. Hogg; P. W. Fry; P. J. Parbrook; R. Airey; A. Tahraoui
- Book ID
- 107455449
- Publisher
- Springer US
- Year
- 2009
- Tongue
- English
- Weight
- 332 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0361-5235
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