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GaN n- and p-type Schottky diodes: Effect of dry etch damage

✍ Scribed by Cao, X.A.; Pearton, S.J.; Dang, G.T.; Zhang, A.P.; Ren, F.; Van Hove, J.M.


Book ID
114538197
Publisher
IEEE
Year
2000
Tongue
English
Weight
123 KB
Volume
47
Category
Article
ISSN
0018-9383

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## Abstract The effect of rapid‐thermal‐annealing on the performance of near‐UV GaN‐based light‐emitting diodes (LEDs) fabricated with nano‐patterned p‐type electrodes has been investigated. One‐dimensional (1‐D) nano‐patterns were formed on Cu‐doped indium oxide (CIO)/indium tin oxide (ITO) p‐elec