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Inductively coupled plasma etching of nano-patterned sapphire for flip-chip GaN light emitting diode applications

✍ Scribed by Byung-Jae Kim; Michael A. Mastro; Hyunjung Jung; Hong-Yeol Kim; Sung Hyun Kim; Ron T. Holm; Jennifer Hite; Charles R. Eddy Jr.; Joona Bang; Jihyun Kim

Book ID: 108290107
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 560 KB
Volume: 516
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2008.05.046

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