Fabrication of GaN-based nanorod light emitting diodes using self-assemble nickel nano-mask and inductively coupled plasma reactive ion etching

✍ Scribed by Hung-Wen Huang; Chih-Chiang Kao; Tao-Hung Hsueh; Chang-Chin Yu; Chia-Feng Lin; Jung-Tang Chu; Hao-Chung Kuo; Shing-Chung Wang

• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 190 KB
• Volume: 113
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/j.mseb.2004.07.004