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Range evaluation in SIMS depth profiles of Er-implantations in silicon

โœ Scribed by K. Mayerhofer; H. Foisner; K. Piplits; G. Hobler; L. Palmetshofer; H. Hutter

Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
259 KB
Volume
252
Category
Article
ISSN
0169-4332

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