๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

SIMS depth profile analysis of sodium in silicon dioxide

โœ Scribed by Y. Yamamoto; N. Shimodaira


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
454 KB
Volume
255
Category
Article
ISSN
0169-4332

No coin nor oath required. For personal study only.


๐Ÿ“œ SIMILAR VOLUMES


SIMS Depth Profiling of Delta-doped Laye
โœ Smirnov, V. K.; Simakin, S. G.; Potapov, E. V.; Makarov, V. V. ๐Ÿ“‚ Article ๐Ÿ“… 1996 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 723 KB

Boron and germanium 6-doped silicon samples were studied using SIMS depth profiling on a Cameca IMS-4F instrument with O,', N z + and Cs' primary beams at various energies and incidence angles. The depth resolution characteristics were compared. We show that, with experimental conditions being the s

Nature of noise in SIMS depth profiling
โœ Makarov, V. V. ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 60 KB ๐Ÿ‘ 1 views

The nature of noise in SIMS depth profiling data has been investigated theoretically. I show that, as earlier experiments proved, the noise of the signal measured with a perfect (absolutely stable) SIMS instrument obeys Poisson's law. Theoretical analysis of the contributions from statistical fluctu