✦ LIBER ✦

Nature of noise in SIMS depth profiling data

✍ Scribed by Makarov, V. V.

Publisher: John Wiley and Sons
Year: 1999
Tongue: English
Weight: 60 KB
Volume: 27
Category: Article
ISSN: 0142-2421
DOI: 10.1002/(sici)1096-9918(199909)27:9<801::aid-sia575>3.0.co;2-z

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✦ Synopsis

The nature of noise in SIMS depth profiling data has been investigated theoretically. I show that, as earlier experiments proved, the noise of the signal measured with a perfect (absolutely stable) SIMS instrument obeys Poisson's law. Theoretical analysis of the contributions from statistical fluctuations and the SIMS instrument operation instability to the noise has shown that deviation from Poisson's law originates from unstable operation of the SIMS instrument. An analytical expression for the noise has been obtained and this agrees well with experimental data.

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