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Ultimate depth resolution and profile reconstruction in sputter profiling with AES and SIMS

✍ Scribed by Siegfried Hofmann

Publisher: John Wiley and Sons
Year: 2000
Tongue: English
Weight: 200 KB
Volume: 30
Category: Article
ISSN: 0142-2421
DOI: 10.1002/1096-9918(200008)30:1<228::aid-sia821>3.0.co;2-e

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