Non-uniform sputtering and degradation of depth resolution during GDOES depth profiling analysis of thin anodic alumina films grown over rough substrates
✍ Scribed by Shimizu, K.; Habazaki, H.; Skeldon, P.; Thompson, G. E.; Wood, G. C.
- Publisher
- John Wiley and Sons
- Year
- 1999
- Tongue
- English
- Weight
- 529 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0142-2421
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✦ Synopsis
Degradation of depth resolution during glow discharge optical emission spectroscopy (GDOES) depth profiling analysis of thin films, formed on relatively rough substrates, has been investigated using preconditioned aluminium substrates of controlled surface roughness. The anodic alumina films, ~120 nm thick, were depth profiled partially and examined carefully by atomic force microscopy and by transmission electron microscopy of ultramicrotomed sections. It is revealed clearly that depth profiling sputters ridges, associated with the rough surface, more rapidly than valleys, thereby degrading depth resolution. Further, such observations show that film sputtering proceeds very smoothly, with relatively little damage to the remaining film material. The excellent depth resolution realized during GDOES depth profiling analysis of films grown on mirror-finished, microscopically flat substrates is clearly associated with the highly uniform sputtering of amorphous anodic alumina.